Inventor
NAKAMURA RYOU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “NAKAMURA RYOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FUJITSU LTD
4 patentsUS7166516B2Jan 23, 2007
Method for fabricating a semiconductor device including the use of a compound containing silicon and nitrogen to form an insulation film of SiN or SiCN
FUJITSU LTD13 citations83
US7037803B2May 2, 2006
Manufacture of semiconductor device having STI and semiconductor device manufactured
FUJITSU LTD12 citations83
US7294577B2Nov 13, 2007
Method of manufacturing a silicide layer
FUJITSU LTD3 citations60
US7345003B2Mar 18, 2008
Semiconductor device manufacturing method, wafer, and wafer manufacturing method
FUJITSU LTD0 citations49