Inventor
KRUSELL WILBUR
US6 patents
Patents
6 patentsUS6594847B1Jul 22, 2003
Single wafer residue, thin film removal and clean
LAM RES CORP112 citations97
US6488040B1Dec 3, 2002
Capillary proximity heads for single wafer cleaning and drying
LAM RES CORP178 citations96
US6616772B2Sep 9, 2003
Methods for wafer proximity cleaning and drying
LAM RES CORP110 citations95
US6428394B1Aug 6, 2002
Method and apparatus for chemical mechanical planarization and polishing of semiconductor wafers using a continuous polishing member feed
LAM RES CORP65 citations94
US6500056B1Dec 31, 2002
Linear reciprocating disposable belt polishing method and apparatus
LAM RES CORP22 citations89
US6746320B2Jun 8, 2004
Linear reciprocating disposable belt polishing method and apparatus
LAM RES CORP15 citations81