Inventor
SOGAN GLORIA
FR6 patents
Patents
6 patentsUS6316045B1Nov 13, 2001
Method and apparatus for conditioning the atmosphere in a process chamber
CIT ALCATEL37 citations94
US6649019B2Nov 18, 2003
Apparatus for conditioning the atmosphere in a vacuum chamber
CIT ALCATEL16 citations91
US7219692B2May 22, 2007
Apparatus for conditioning the atmosphere in a chamber
CIT ALCATEL5 citations72
US7468790B2Dec 23, 2008
Detecting gaseous species by light-emission spectrometry with spectrum processing
CIT ALCATEL3 citations58
US7403283B2Jul 22, 2008
Detecting minority gaseous species by light-emission spectroscopy
CIT ALCATEL4 citations58
US7370482B2May 13, 2008
Rapidly regenerating cryogenic trap
CIT ALCATEL0 citations31