Inventor
SHIMODA MAKI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SHIMODA MAKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
5 patentsUS8383396B2Feb 26, 2013
Apparatus and method for measuring biological material
HITACHI LTD48 citations93
US5747387AMay 5, 1998
Removal method of organic matter and system for the same
HITACHI LTD34 citations90
US6720234B2Apr 13, 2004
Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing
HITACHI LTD5 citations73
US6562695B1May 13, 2003
Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing
HITACHI LTD12 citations73
US6444405B1Sep 3, 2002
Method of forming conductive layers in the trenches or through holes made in an insulating film on a semiconductors substrate
HITACHI LTD3 citations60