Inventor
YU CHIA-SHENG
TW6 patents
Patents
6 patentsUS7078307B2Jul 18, 2006
Method for manufacturing single-sided buried strap in semiconductor devices
NANYA TECHNOLOGY CORP15 citations82
US6989561B2Jan 24, 2006
Trench capacitor structure
NANYA TECHNOLOGY CORP15 citations80
US7094672B2Aug 22, 2006
Method for forming self-aligned contact in semiconductor device
NANYA TECHNOLOGY CORP8 citations72
US6977210B1Dec 20, 2005
Method for forming bit line contact hole/contact structure
NANYA TECHNOLOGY CORP3 citations60
US6867091B1Mar 15, 2005
Method for forming deep trench capacitor with liquid phase deposition oxide as collar oxide
NANYA TECHNOLOGY CORP1 citations48
US7361546B2Apr 22, 2008
Method of forming conductive stud on vertical memory device
NANYA TECHNOLOGY CORP0 citations33