Inventor
MAULA JARMO ILMARI
FI5 patents
Patents
5 patentsUS7021330B2Apr 4, 2006
Diaphragm valve with reliability enhancements for atomic layer deposition
PLANAR SYSTEMS INC384 citations97
US6941963B2Sep 13, 2005
High-speed diaphragm valve for atomic layer deposition
PLANAR SYSTEMS INC31 citations90
US6907897B2Jun 21, 2005
Diaphragm valve for high-temperature precursor supply in atomic layer deposition
PLANAR SYSTEMS INC30 citations90
US7294360B2Nov 13, 2007
Conformal coatings for micro-optical elements, and method for making the same
PLANAR SYSTEMS INC20 citations85
US7191793B2Mar 20, 2007
Diaphragm valve for atomic layer deposition
PLANAR SYSTEMS INC10 citations82