Inventor
ALBRECHT HANS-STEPHAN
DE17 patents
⚠️ This page may combine multiple inventors who share the name “ALBRECHT HANS-STEPHAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAMBDA PHYSIK AG
14 patentsUS6807205B1Oct 19, 2004
Precise monitor etalon calibration technique
LAMBDA PHYSIK AG26 citations92
US6504861B2Jan 7, 2003
Laser gas replenishment method
LAMBDA PHYSIK AG24 citations92
US6493370B2Dec 10, 2002
Laser gas replenishment method
LAMBDA PHYSIK AG16 citations92
US6490308B2Dec 3, 2002
Laser gas replenishment method
LAMBDA PHYSIK AG27 citations92
US6389052B2May 14, 2002
Laser gas replenishment method
LAMBDA PHYSIK AG32 citations92
US6285701B1Sep 4, 2001
Laser resonator for improving narrow band emission of an excimer laser
LAMBDA PHYSIK AG33 citations92
US6735225B2May 11, 2004
Chirp compensation method and apparatus
LAMBDA PHYSIK AG18 citations82
US6965624B2Nov 15, 2005
Laser gas replenishment method
LAMBDA PHYSIK AG7 citations73
US6327284B1Dec 4, 2001
Detector with frequency converting coating
LAMBDA PHYSIK AG13 citations73
US6822977B1Nov 23, 2004
Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser
LAMBDA PHYSIK AG10 citations72
US6618403B2Sep 9, 2003
Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser
LAMBDA PHYSIK AG8 citations68
US6404796B1Jun 11, 2002
Laser resonator for improving narrow band emission of an excimer laser
LAMBDA PHYSIK AG9 citations68
US7266137B2Sep 4, 2007
Laser gas replenishment method
LAMBDA PHYSIK AG5 citations62
US6389048B2May 14, 2002
Detector with frequency converting coating
LAMBDA PHYSIK AG5 citations62