Inventor
EKBERG PETER
SE10 patents
Patents
10 patentsUS7444616B2Oct 28, 2008
Method for error reduction in lithography
MICRONIC LASER SYSTEMS AB56 citations97
US6883158B1Apr 19, 2005
Method for error reduction in lithography
MICRONIC LASER SYSTEMS AB130 citations96
US6700600B1Mar 2, 2004
Beam positioning in microlithography writing
MICRONIC LASER SYSTEMS AB22 citations89
US7285365B2Oct 23, 2007
Image enhancement for multiple exposure beams
MICRONIC LASER SYSTEMS AB12 citations83
US6948254B2Sep 27, 2005
Method for calibration of a metrology stage
MICRONIC LASER SYSTEMS AB18 citations82
US6844123B1Jan 18, 2005
System for production of large area display panels with improved precision
MICRONIC LASER SYSTEMS AB16 citations76
US7912671B2Mar 22, 2011
Method for measuring the position of a mark in a deflector system
MICRONIC LASER SYSTEMS AB3 citations61
US7709165B2May 4, 2010
Image enhancement for multiple exposure beams
MICRONIC LASER SYSTEMS AB3 citations61
US7148971B2Dec 12, 2006
Apparatus for measuring the physical properties of a surface and a pattern generating apparatus for writing a pattern on a surface
MICRONIC LASER SYSTEMS AB6 citations61
US7488957B2Feb 10, 2009
Pattern generation methods and apparatuses
MICRONIC LASER SYSTEMS AB5 citations54