Inventor
JIN CHENG-GUO
JP20 patents
⚠️ This page may combine multiple inventors who share the name “JIN CHENG-GUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
PANASONIC CORP
14 patentsUS7759254B2Jul 20, 2010
Method for forming impurity-introduced layer, method for cleaning object to be processed apparatus for introducing impurity and method for producing device
PANASONIC CORP21 citations92
US7601619B2Oct 13, 2009
Method and apparatus for plasma processing
PANASONIC CORP32 citations92
US7700382B2Apr 20, 2010
Impurity introducing method using optical characteristics to determine annealing conditions
PANASONIC CORP10 citations84
US7456085B2Nov 25, 2008
Method for introducing impurities
PANASONIC CORP14 citations84
US7741199B2Jun 22, 2010
Method for introducing impurities and apparatus for introducing impurities
PANASONIC CORP6 citations74
US7709362B2May 4, 2010
Method for introducing impurities and apparatus for introducing impurities
PANASONIC CORP6 citations74
US7696072B2Apr 13, 2010
Method for introduction impurities and apparatus for introducing impurities
PANASONIC CORP6 citations74
US7618883B2Nov 17, 2009
Method for introducing impurities and apparatus for introducing impurities
PANASONIC CORP6 citations74
US7981779B2Jul 19, 2011
Method for making junction and processed material formed using the same
PANASONIC CORP2 citations63
US7858155B2Dec 28, 2010
Plasma processing method and plasma processing apparatus
PANASONIC CORP4 citations63
US7582492B2Sep 1, 2009
Method of doping impurities, and electronic element using the same
PANASONIC CORP4 citations63
US7858479B2Dec 28, 2010
Method and apparatus of fabricating semiconductor device
PANASONIC CORP2 citations62
US7626184B2Dec 1, 2009
Impurity introducing apparatus and impurity introducing method
PANASONIC CORP1 citations52
US7622725B2Nov 24, 2009
Impurity introducing apparatus and impurity introducing method
PANASONIC CORP0 citations52