Inventor
SANT SANKET
US10 patents
⚠️ This page may combine multiple inventors who share the name “SANT SANKET”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
4 patentsUS7560390B2Jul 14, 2009
Multiple spacer steps for pitch multiplication
MICRON TECHNOLOGY INC68 citations97
US8003542B2Aug 23, 2011
Multiple spacer steps for pitch multiplication
MICRON TECHNOLOGY INC12 citations92
US9117766B2Aug 25, 2015
Method for positioning spacers in pitch multiplication
MICRON TECHNOLOGY INC9 citations84
US8865598B2Oct 21, 2014
Method for positioning spacers in pitch multiplication
MICRON TECHNOLOGY INC9 citations84
SANT SANKET
3 patentsUS8598041B2Dec 3, 2013
Method for positioning spacers in pitch multiplication
SANT SANKET8 citations83
US8232538B2Jul 31, 2012
Method and apparatus of halogen removal using optimal ozone and UV exposure
SANT SANKET9 citations81
US8173550B2May 8, 2012
Method for positioning spacers for pitch multiplication
SANT SANKET5 citations72