Inventor
VAN DEN SCHOOR LEON JOSEPH MARIE
NL3 patents
Patents
3 patentsUS7462841B2Dec 9, 2008
Lithographic apparatus, device manufacturing method, and use of a radiation collector
ASML NETHERLANDS BV9 citations81
US9285686B2Mar 15, 2016
Lithographic apparatus involving an immersion liquid supply system with an aperture
ASML NETHERLANDS BV2 citations62
US7897941B2Mar 1, 2011
Lithographic apparatus, device manufacturing method, and use of a radiation collector
ASML NETHERLANDS BV2 citations59