Inventor

Kumagai Yoshihisa

JP4 patents

Patents

4 patents

USD932725SOct 5, 2021

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TOKYO ELECTRON LTD6 citations81

USD923902SJun 29, 2021

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TOKYO ELECTRON LTD6 citations81

USD937526SNov 30, 2021

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TOKYO ELECTRON LTD2 citations70

US11114318B2Sep 7, 2021

Assembling apparatus and assembling method for semiconductor manufacturing apparatus

TOKYO ELECTRON LTD0 citations59