Inventor
INFANTE ANTHONY
US4 patents
Patents
4 patentsUS9960024B2May 1, 2018
Biasable flux optimizer / collimator for PVD sputter chamber
APPLIED MATERIALS INC12 citations91
US10347474B2Jul 9, 2019
Biasable flux optimizer / collimator for PVD sputter chamber
APPLIED MATERIALS INC4 citations83
US10727033B2Jul 28, 2020
Biasable flux optimizer / collimator for PVD sputter chamber
APPLIED MATERIALS INC1 citations72
US11309169B2Apr 19, 2022
Biasable flux optimizer / collimator for PVD sputter chamber
APPLIED MATERIALS INC0 citations61