Inventor
SHIBAYAMA KEI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “SHIBAYAMA KEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUS12211665B2Jan 28, 2025
Charged particle beam device
HITACHI HIGH TECH CORP0 citations60
US11929231B2Mar 12, 2024
Charged particle beam device
HITACHI HIGH TECH CORP0 citations60
US11335533B2May 17, 2022
Charged particle beam device
HITACHI HIGH TECH CORP0 citations60
US11946858B2Apr 2, 2024
Examination device
HITACHI HIGH TECH CORP0 citations47