Inventor
YOMODA MINORU
JP5 patents
Patents
5 patentsUS4635373AJan 13, 1987
Wafer conveying apparatus with alignment mechanism
CANON KK37 citations92
US4600282AJul 15, 1986
Alignment apparatus
CANON KK43 citations90
US4659227AApr 21, 1987
Alignment apparatus
CANON KK21 citations81
US4538914ASep 3, 1985
Transfer apparatus for compensating for a transfer error
CANON KK25 citations80
US4669842AJun 2, 1987
Projection optical device
CANON KK20 citations79