Inventor

JACOBS FRANSISCUS M

NL4 patents

⚠️ This page may combine multiple inventors who share the name “JACOBS FRANSISCUS M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PHILIPS CORP

2 patents

US5172160ADec 15, 1992

Optical lithographic device having a machine frame with force compensation

PHILIPS CORP124 citations95

US5150153ASep 22, 1992

Lithographic device with a suspended object table

PHILIPS CORP66 citations90

ASML NETHERLANDS BV

2 patents

US6721035B1Apr 13, 2004

Lithographic projection apparatus

ASML NETHERLANDS BV48 citations91

US6404483B1Jun 11, 2002

Substrate handler for use in lithographic projection apparatus

ASML NETHERLANDS BV31 citations87