Inventor

SAKAMOTO EIJI

JP52 patents

⚠️ This page may combine multiple inventors who share the name “SAKAMOTO EIJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SAKAMOTO EIJI

CANON KK

Stage control apparatus and exposure apparatus

Vacuum chuck

Wafer table and exposure apparatus with the same

Wafer holding device in an exposure apparatus

Pressure partition for X-ray exposure apparatus

Temperature controlling device for mask and wafer holders

Display apparatus

Exposure apparatus with a substrate holding mechanism

Liquid cooled x-ray lithographic exposure apparatus

Wafer supporting apparatus

Alignment apparatus and SOR x-ray exposure apparatus having same

Liquid crystal device with a protective layer of a particular coefficient of expansion

Illumination system and scan type exposure apparatus

Alignment apparatus and SOR X-ray exposure apparatus having same

Exposure method

Exposure apparatus

Exposure apparatus and device manufacturing method

Optical element holder, exposure apparatus, and device fabricating method

Correcting device, exposure apparatus, device production method, and device produced by the device production method

Exposure apparatus and device manufacturing method

Positioning apparatus, exposure apparatus and method of manufacturing semiconductor device

Method of reading signals in a charge-storage line sensor in which each storage device is sequentially read and then reset during a subsequent dead time interval

Process for producing color filter using alignment marks

Pattern forming method and method of manufacturing article

Cooling apparatus

Correcting device, exposure apparatus, device production method, and device produced by the device production method

Cooling apparatus

Imprint apparatus, imprinting method, and method for manufacturing article

Exposure apparatus and method for manufacturing device

Correcting device, exposure apparatus, device production method, and device produced by the device production method

Correcting device, exposure apparatus, device production method, and device produced by the device production method

Cooling apparatus

Chamber, exposure apparatus, and device manufacturing method

Optical element holder, exposure apparatus, and device fabricating method

DAIKIN IND LTD

Nonaqueous emulsified surface treating agent composition

Compound having isocyanuric skeleton and composition in which said compound is included

Process for fluorinating cellulosic materials and fluorinated cellulosic materials

Compound having isocyanuric skeleton and composition in which said compound is included

Curable composition, method for producing same, and article using same

Curable composition, process for producing same, and article produced therewith

Functional film

Process for producing receiving object having transferred pattern

HITACHI LTD

NC program conversion process method and processing treatment system

Functional device

NC program conversion process method and processing treatment system

SHARP KK

Method for producing antifouling film

Method for producing antifouling film

HITACHI METALS LTD

Functional device package with metallization arrangement for improved bondability of two substrates

HATA SHOHEI

Submount for optical device and its manufacturing method

SAKAMOTO EIJI

Bonding structure and method for manufacturing same