Inventor
HAAS BRIAN L
US4 patents
⚠️ This page may combine multiple inventors who share the name “HAAS BRIAN L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6215106B1Apr 10, 2001
Thermally processing a substrate
APPLIED MATERIALS INC87 citations95
US6803546B1Oct 12, 2004
Thermally processing a substrate
APPLIED MATERIALS INC25 citations91
US6280790B1Aug 28, 2001
Reducing the deposition rate of volatile contaminants onto an optical component of a substrate processing system
APPLIED MATERIALS INC14 citations70