Inventor · disambiguated record
Dietrich Schubert
Also filed as: SCHUBERT DIETRICH
14 granted patents·1 pending application·579 citations·filing 1993–2012
94Inventor score
Top patents by PatentIndex Score
15 records- 0195US5723353AProcess for manufacturing a sensorBOSCH GMBH ROBERT·Filed 1996·Granted Mar 3, 1998·106 cites·11 claims
- 0293US6106735AWafer stack and method of producing sensorsBOSCH GMBH ROBERT·Filed 1998·Granted Aug 22, 2000·102 cites·12 claims
- 0387US6055858AAcceleration sensorBOSCH GMBH ROBERT·Filed 1999·Granted May 2, 2000·55 cites·3 claims
- 0486US6360605B1Micromechanical deviceBOSCH GMBH ROBERT·Filed 2000·Granted Mar 26, 2002·73 cites·9 claims
- 0585US6634232B1Acceleration sensor with limited movability in the vertical directionBOSCH GMBH ROBERT·Filed 2000·Granted Oct 21, 2003·61 cites·7 claims
- 0685US6272926B1Micromechanical componentBOSCH GMBH ROBERT·Filed 1999·Granted Aug 14, 2001·65 cites·19 claims
- 0784US5959208AAcceleration sensorGMBH ROBERT BOSCH·Filed 1997·Granted Sep 28, 1999·52 cites·6 claims
- 0868US7878061B2Micromechanical system including a suspension and an electrode positioned movablyBOSCH GMBH ROBERT·Filed 2008·Granted Feb 1, 2011·5 cites·11 claims
- 0965US6318177B2Micromechanical component and method for producing the micromechanical componentBOSCH GMBH ROBERT·Filed 1999·Granted Nov 20, 2001·25 cites·18 claims
- 1065US5461917AAcceleration sensorBOSCH GMBH ROBERT·Filed 1993·Granted Oct 31, 1995·23 cites·12 claims
- 1163US8393215B2Micromechanical acceleration sensor having an open seismic massSTAHL HEIKO·Filed 2009·Granted Mar 12, 2013·4 cites·11 claims
- 1262US8336382B2Acceleration sensor and method for its manufactureCLASSEN JOHANNES·Filed 2009·Granted Dec 25, 2012·3 cites·10 claims
- 1361US9239339B2Acceleration sensor and method for operating an acceleration sensorKAACK ROLF·Filed 2012·Granted Jan 19, 2016·2 cites·14 claims
- 1459US8429971B2Multiaxial micromechanical acceleration sensorCLASSEN JOHANNES·Filed 2007·Granted Apr 30, 2013·3 cites·10 claims
- 1529US2012073370A1Micromechanical structureSCHUBERT DIETRICH·Filed 2010·Application pending·0 cites
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