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Inventor
HENNAN JOHN M
US
3 patents
⚠️ This page may combine multiple inventors who share the name “HENNAN JOHN M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
2 patents
US6425502B1
Jul 30, 2002
Containment system
ENTEGRIS INC
32 citations
89
US6648182B2
Nov 18, 2003
Containment system
ENTEGRIS INC
13 citations
81
FLUOROWARE INC
1 patent
US6079597A
Jun 27, 2000
Containment system
FLUOROWARE INC
44 citations
89