Inventor
OOHIRABARU YUUZOU
JP8 patents
⚠️ This page may combine multiple inventors who share the name “OOHIRABARU YUUZOU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
7 patentsUS7353076B2Apr 1, 2008
Vacuum processing method and vacuum processing apparatus
HITACHI HIGH TECH CORP14 citations80
US9514967B2Dec 6, 2016
Plasma processing apparatus
HITACHI HIGH TECH CORP4 citations72
US7585383B2Sep 8, 2009
Vacuum processing apparatus
HITACHI HIGH TECH CORP7 citations72
US10559481B2Feb 11, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations51
US10522331B2Dec 31, 2019
Plasma processing apparatus
HITACHI HIGH TECH CORP0 citations51
US10727088B2Jul 28, 2020
Plasma processing apparatus and plasma processing method
HITACHI HIGH TECH CORP0 citations41
US9831096B2Nov 28, 2017
Plasma processing method and plasma processing apparatus
HITACHI HIGH TECH CORP0 citations37