Inventor
ISHIMARU NOBUO
JP18 patents
⚠️ This page may combine multiple inventors who share the name “ISHIMARU NOBUO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI INT ELECTRIC INC
9 patentsUS7900580B2Mar 8, 2011
Substrate processing apparatus and reaction container
HITACHI INT ELECTRIC INC27 citations92
US7861668B2Jan 4, 2011
Batch-type remote plasma processing apparatus
HITACHI INT ELECTRIC INC19 citations92
US8047158B2Nov 1, 2011
Substrate processing apparatus and reaction container
HITACHI INT ELECTRIC INC8 citations84
US8028652B2Oct 4, 2011
Batch-type remote plasma processing apparatus
HITACHI INT ELECTRIC INC7 citations83
US8020514B2Sep 20, 2011
Batch-type remote plasma processing apparatus
HITACHI INT ELECTRIC INC9 citations83
US7767053B2Aug 3, 2010
Substrate processing apparatus and substrate processing method
HITACHI INT ELECTRIC INC14 citations79
US9039912B2May 26, 2015
Batch-type remote plasma processing apparatus
HITACHI INT ELECTRIC INC3 citations62
US7958842B2Jun 14, 2011
Substrate processing apparatus
HITACHI INT ELECTRIC INC2 citations60
US9373499B2Jun 21, 2016
Batch-type remote plasma processing apparatus
HITACHI INT ELECTRIC INC0 citations51
ISHIMARU NOBUO
3 patentsUS8093072B2Jan 10, 2012
Substrate processing apparatus and method of manufacturing semiconductor device
ISHIMARU NOBUO12 citations82
US8251012B2Aug 28, 2012
Substrate processing apparatus and semiconductor device producing method
ISHIMARU NOBUO6 citations71
US8297224B2Oct 30, 2012
Substrate processing apparatus
ISHIMARU NOBUO3 citations61