Inventor

BRENCHER LOTHAR

DE5 patents

⚠️ This page may combine multiple inventors who share the name “BRENCHER LOTHAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES AG

4 patents

US6475919B2Nov 5, 2002

Method for producing trenches for DRAM cell configurations

INFINEON TECHNOLOGIES AG6 citations54

US9082719B2Jul 14, 2015

Method for removing a dielectric layer from a bottom of a trench

INFINEON TECHNOLOGIES AG2 citations51

US9543157B2Jan 10, 2017

Method for processing a carrier, a method for operating a plasma processing chamber, and a method for processing a semiconductor wafer

INFINEON TECHNOLOGIES AG0 citations48

US9305798B2Apr 5, 2016

Device and method for stopping etching process

INFINEON TECHNOLOGIES AG1 citations48

BRENCHER LOTHAR

1 patent

US8404597B2Mar 26, 2013

Device and method for stopping an etching process

BRENCHER LOTHAR0 citations41