Inventor

HARTENBERGER MICHAEL

DE2 patents

⚠️ This page may combine multiple inventors who share the name “HARTENBERGER MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

INFINEON TECHNOLOGIES AG

1 patent

US9305798B2Apr 5, 2016

Device and method for stopping etching process

INFINEON TECHNOLOGIES AG1 citations48

BRENCHER LOTHAR

1 patent

US8404597B2Mar 26, 2013

Device and method for stopping an etching process

BRENCHER LOTHAR0 citations41