Inventor
TILLMANN RALF
DE8 patents
⚠️ This page may combine multiple inventors who share the name “TILLMANN RALF”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
INTEGRATED DYNAMICS ENG GMBH
3 patentsUS7234913B2Jun 26, 2007
Fast swapping station for wafer transport
INTEGRATED DYNAMICS ENG GMBH22 citations91
US7264436B2Sep 4, 2007
Robot-guidance assembly for providing a precision motion of an object
INTEGRATED DYNAMICS ENG GMBH22 citations90
US7400392B2Jul 15, 2008
Apparatus for handling of a disklike member, especially for handling of a wafer
INTEGRATED DYNAMICS ENG GMBH7 citations71