Inventor
ZANONI CARL A
17 patents
⚠️ This page may combine multiple inventors who share the name “ZANONI CARL A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZYGO CORP
16 patentsUS6724486B1Apr 20, 2004
Helium- Neon laser light source generating two harmonically related, single- frequency wavelengths for use in displacement and dispersion measuring interferometry
ZYGO CORP105 citations96
US6181420B1Jan 30, 2001
Interferometry system having reduced cyclic errors
ZYGO CORP124 citations96
US5724136AMar 3, 1998
Interferometric apparatus for measuring motions of a stage relative to fixed reflectors
ZYGO CORP82 citations96
US4881816ANov 21, 1989
Linear and angular displacement measuring interferometer
ZYGO CORP94 citations96
US4883357ANov 28, 1989
Dual high stability interferometer
ZYGO CORP56 citations92
US6643024B2Nov 4, 2003
Apparatus and method(s) for reducing the effects of coherent artifacts in an interferometer
ZYGO CORP24 citations89
US6771375B2Aug 3, 2004
Apparatus and method for measuring aspherical optical surfaces and wavefronts
ZYGO CORP17 citations84
US7639367B2Dec 29, 2009
Interferometer system for monitoring an object
ZYGO CORP9 citations83
US4169980AOct 2, 1979
Method and apparatus for interference fringe center sensing
ZYGO CORP20 citations82
US3961838AJun 8, 1976
Apparatus for producing a scanning laser beam of constant linear velocity
ZYGO CORP30 citations82
US3977789AAug 31, 1976
Scanning differential photoelectric autocollimator
ZYGO CORP28 citations80
US3975102AAug 17, 1976
Scanning photoelectric autocollimator
ZYGO CORP23 citations75
US6816267B2Nov 9, 2004
Apparatus and method for calibrating an interferometer using a selectively rotatable sphere
ZYGO CORP8 citations73
US4074937AFeb 21, 1978
Optical measuring device
ZYGO CORP10 citations73
US3984153AOct 5, 1976
Apparatus to transform a single laser beam into two parallel beams of adjustable spacing and intensity
ZYGO CORP8 citations73
US6876452B2Apr 5, 2005
Apparatus and methods for high accuracy metrology and positioning of a body
ZYGO CORP5 citations62