P

Inventor

MINAMI MASAYOSHI

JP24 patents
⚠️ This page may combine multiple inventors who share the name “MINAMI MASAYOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOKUSAI ELECTRIC CORP

12 patents
US10640869B2May 5, 2020

Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP3 citations73
US11434564B2Sep 6, 2022

Method of manufacturing semiconductor device, substrate processing apparatus, recording medium and method of processing substrate

KOKUSAI ELECTRIC CORP2 citations72
US11885016B2Jan 30, 2024

Method of processing substrate, method of manufacturing semiconductor device, substrate processing apparatus and recording medium

KOKUSAI ELECTRIC CORP0 citations62
US12195848B2Jan 14, 2025

Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations61
US11618947B2Apr 4, 2023

Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations61
US12406843B2Sep 2, 2025

Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations60
US12266522B2Apr 1, 2025

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations60
US11915927B2Feb 27, 2024

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP0 citations60
US11823886B2Nov 21, 2023

Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations60
US11361961B2Jun 14, 2022

Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium

KOKUSAI ELECTRIC CORP1 citations60
US11728159B2Aug 15, 2023

Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations59
US11257669B2Feb 22, 2022

Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium

KOKUSAI ELECTRIC CORP0 citations59

HITACHI INT ELECTRIC INC

6 patents

YAZAKI CORP

4 patents

HOKURIKU ELECT IND

1 patent

YUASA KAZUHIRO

1 patent