Inventor
KRYWANCZYK TIMOTHY CHARLES
US5 patents
Patents
5 patentsUS5913125AJun 15, 1999
Method of controlling stress in a film
IBM68 citations91
US5842910ADec 1, 1998
Off-center grooved polish pad for CMP
IBM72 citations91
US6328794B1Dec 11, 2001
Method of controlling stress in a film
IBM11 citations69
US7700488B2Apr 20, 2010
Recycling of ion implantation monitor wafers
IBM2 citations57
US7732303B2Jun 8, 2010
Method for recycling of ion implantation monitor wafers
IBM1 citations46