Inventor
YU SHANG-YUAN
TW8 patents
Patents
8 patentsUS11090696B2Aug 17, 2021
Apparatus and method of removing photoresist layer
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12053745B2Aug 6, 2024
System for storing chemical liquid and method for adjusting gas concentration in chemical liquid
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US11664235B2May 30, 2023
Photoresist removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations57
US10510527B2Dec 17, 2019
Single wafer cleaning tool with H2SO4 recycling
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations55
US10486204B2Nov 26, 2019
Semiconductor apparatus and method of removing photoresist layer on substrate
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US9805946B2Oct 31, 2017
Photoresist removal
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46
US9781994B2Oct 10, 2017
Wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations36
US9349617B2May 24, 2016
Mechanisms for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations35