Inventor
PFEIFFER HANS C
23 patents
⚠️ This page may combine multiple inventors who share the name “PFEIFFER HANS C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
21 patentsUS5466904ANov 14, 1995
Electron beam lithography system
IBM54 citations96
US4415851ANov 15, 1983
System for contactless testing of multi-layer ceramics
IBM55 citations96
US4376249AMar 8, 1983
Variable axis electron beam projection system
IBM54 citations96
US4213053AJul 15, 1980
Electron beam system with character projection capability
IBM56 citations96
US4417203ANov 22, 1983
System for contactless electrical property testing of multi-layer ceramics
IBM67 citations95
US4243866AJan 6, 1981
Method and apparatus for forming a variable size electron beam
IBM63 citations95
US4818885AApr 4, 1989
Electron beam writing method and system using large range deflection in combination with a continuously moving table
IBM79 citations94
US6069684AMay 30, 2000
Electron beam projection lithography system (EBPS)
IBM42 citations92
US5633507AMay 27, 1997
Electron beam lithography system with low brightness
IBM44 citations92
US5545902AAug 13, 1996
Electron beam lithography system
IBM34 citations92
US4544846AOct 1, 1985
Variable axis immersion lens electron beam projection system
IBM37 citations92
US4843330AJun 27, 1989
Electron beam contactless testing system with grid bias switching
IBM35 citations91
US3984687AOct 5, 1976
Shielded magnetic lens and deflection yoke structure for electron beam column
IBM36 citations90
US4423305ADec 27, 1983
Method and apparatus for controlling alignment of an electron beam of a variable shape
IBM20 citations82
US4859856AAug 22, 1989
Telecentric sub-field deflection with vail
IBM21 citations81
US4945246AJul 31, 1990
Tri-deflection electron beam system
IBM21 citations80
US4251728AFeb 17, 1981
Compensated magnetic deflection coil for electron beam lithography system
IBM17 citations73
US4000440ADec 28, 1976
Method and apparatus for controlling brightness and alignment of a beam of charged particles
IBM12 citations70
US6130432AOct 10, 2000
Particle beam system with dynamic focusing
IBM15 citations67
US6710361B2Mar 23, 2004
Multi-beam hybrid solenoid lens electron beam system
IBM6 citations63
US6633040B1Oct 14, 2003
Solenoid electron beam lenses with high demagnification and low aberrations
IBM1 citations52