Inventor
STURANS MARIS A
18 patents
Patents
18 patentsUS4376249AMar 8, 1983
Variable axis electron beam projection system
IBM54 citations96
US4544846AOct 1, 1985
Variable axis immersion lens electron beam projection system
IBM37 citations92
US6806943B2Oct 19, 2004
Mask clamping device
IBM24 citations89
US4859856AAug 22, 1989
Telecentric sub-field deflection with vail
IBM21 citations81
US5043586AAug 27, 1991
Planarized, reusable calibration grids
IBM19 citations80
US4945246AJul 31, 1990
Tri-deflection electron beam system
IBM21 citations80
US6028662AFeb 22, 2000
Adjustment of particle beam landing angle
IBM12 citations73
US4251728AFeb 17, 1981
Compensated magnetic deflection coil for electron beam lithography system
IBM17 citations73
US5169488ADec 8, 1992
Method of forming planarized, reusable calibration grids
IBM16 citations71
US6586746B1Jul 1, 2003
Multipole electrostatic e-beam deflector
IBM12 citations70
US5570405AOct 29, 1996
Registration and alignment technique for X-ray mask fabrication
IBM18 citations69
US4737644AApr 12, 1988
Conductive coated semiconductor electrostatic deflection plates
IBM7 citations69
US6710361B2Mar 23, 2004
Multi-beam hybrid solenoid lens electron beam system
IBM6 citations63
US6486953B1Nov 26, 2002
Accurate real-time landing angle and telecentricity measurement in lithographic systems
IBM4 citations62
US6369396B1Apr 9, 2002
Calibration target for electron beams
IBM2 citations62
US6633040B1Oct 14, 2003
Solenoid electron beam lenses with high demagnification and low aberrations
IBM1 citations52
US6429607B1Aug 6, 2002
Constant power dynamic focus coil
IBM0 citations52
US7863563B2Jan 4, 2011
Carbon tube for electron beam application
IBM0 citations40