Inventor
FORSYTH JAMES M
8 patents
⚠️ This page may combine multiple inventors who share the name “FORSYTH JAMES M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HAMPSHIRE INSTR INC
4 patentsUS4969169ANov 6, 1990
X-ray lithography system
HAMPSHIRE INSTR INC31 citations91
US4896341AJan 23, 1990
Long life X-ray source target
HAMPSHIRE INSTR INC23 citations91
US4700371AOct 13, 1987
Long life x-ray source target
HAMPSHIRE INSTR INC44 citations91
US4980896ADec 25, 1990
X-ray lithography system
HAMPSHIRE INSTR INC32 citations86