Inventor
PATEL NOREIN NARENDRA
US2 patents
Patents
2 patentsUS6033922AMar 7, 2000
Monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer
ADVANCED MICRO DEVICES INC82 citations92
US5970313AOct 19, 1999
Monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer
ADVANCED MICRO DEVICES INC63 citations92