Inventor
KO JUN-CHENG
TW7 patents
⚠️ This page may combine multiple inventors who share the name “KO JUN-CHENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VANGUARD INT SEMICONDUCT CORP
6 patentsUS5817579AOct 6, 1998
Two step plasma etch method for forming self aligned contact
VANGUARD INT SEMICONDUCT CORP96 citations97
US5854135ADec 29, 1998
Optimized dry etching procedure, using an oxygen containing ambient, for small diameter contact holes
VANGUARD INT SEMICONDUCT CORP24 citations90
US6211557B1Apr 3, 2001
Contact structure using taper contact etching and polycide step
VANGUARD INT SEMICONDUCT CORP12 citations73
US5915198AJun 22, 1999
Contact process using taper contact etching and polycide step
VANGUARD INT SEMICONDUCT CORP14 citations73
US6069077AMay 30, 2000
UV resist curing as an indirect means to increase SiN corner selectivity on self-aligned contact etching process
VANGUARD INT SEMICONDUCT CORP9 citations72
US5788767AAug 4, 1998
Method for forming single sin layer as passivation film
VANGUARD INT SEMICONDUCT CORP8 citations65