Inventor

SEONG DAE JIN

KR4 patents

⚠️ This page may combine multiple inventors who share the name “SEONG DAE JIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KOREA RES INST STANDARDS & SCI

2 patents

US11211231B2Dec 28, 2021

Plasma generation apparatus

KOREA RES INST STANDARDS & SCI0 citations44

US11867643B2Jan 9, 2024

Planar-type plasma diagnosis apparatus, wafer-type plasma diagnosis apparatus in which planar-type plasma diagnosis apparatus is buried, and electrostatic chuck in which planar-type plasma diagnosis apparatus is buried

KOREA RES INST STANDARDS & SCI0 citations42

KOREA RES INST OF STANDARS AND

1 patent

US6687626B2Feb 3, 2004

Apparatus for measuring distribution of flow rates of flowable medium

KOREA RES INST OF STANDARS AND1 citations39

KOREA RES INST OF STANDARDS

1 patent

US7830505B2Nov 9, 2010

Structure for diagnosis system of reaction process

KOREA RES INST OF STANDARDS0 citations38