Inventor

SHIN DONG-WHA

KR2 patents

Patents

2 patents

US6924072B2Aug 2, 2005

Method for exposing a peripheral area of a wafer and apparatus for performing the same

SAMSUNG ELECTRONICS CO LTD8 citations71

US6795162B2Sep 21, 2004

Method for exposing a peripheral area of a wafer and apparatus for performing the same

SAMSUNG ELECTRONICS CO LTD1 citations49