Inventor
DAWSON KEITH
US9 patents
⚠️ This page may combine multiple inventors who share the name “DAWSON KEITH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
3 patentsUS6350317B1Feb 26, 2002
Linear drive system for use in a plasma processing system
LAM RES CORP78 citations95
US6863784B2Mar 8, 2005
Linear drive system for use in a plasma processing system
LAM RES CORP15 citations92
US6669811B2Dec 30, 2003
Linear drive system for use in a plasma processing system
LAM RES CORP20 citations92