Inventor

RAO NAGARAJA P

US7 patents

⚠️ This page may combine multiple inventors who share the name “RAO NAGARAJA P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV MINNESOTA

3 patents

US5874134AFeb 23, 1999

Production of nanostructured materials by hypersonic plasma particle deposition

UNIV MINNESOTA196 citations96

US5270542ADec 14, 1993

Apparatus and method for shaping and detecting a particle beam

UNIV MINNESOTA87 citations93

US6924004B2Aug 2, 2005

Apparatus and method for synthesizing films and coatings by focused particle beam deposition

UNIV MINNESOTA67 citations92

REAL TIME METROLOGY INC

2 patents

US6809809B2Oct 26, 2004

Optical method and apparatus for inspecting large area planar objects

REAL TIME METROLOGY INC119 citations96

US6630996B2Oct 7, 2003

Optical method and apparatus for inspecting large area planar objects

REAL TIME METROLOGY INC161 citations96

MICROTHERM LLC

1 patent

US5909276AJun 1, 1999

Optical inspection module and method for detecting particles and defects on substrates in integrated process tools

MICROTHERM LLC210 citations96

IBM

1 patent

US5481357AJan 2, 1996

Apparatus and method for high-efficiency, in-situ particle detection

IBM46 citations89