Inventor
BARTON KEITH E
US3 patents
Patents
3 patentsUS7079381B2Jul 18, 2006
System and method for aligning and supporting interconnect systems
IBM53 citations94
US7560692B2Jul 14, 2009
Method of TEM sample preparation for electron holography for semiconductor devices
IBM2 citations59
US7504337B2Mar 17, 2009
IC chip uniform delayering methods
IBM4 citations59