Inventor
BYSTRYAK ILYA
US13 patents
⚠️ This page may combine multiple inventors who share the name “BYSTRYAK ILYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
6 patentsUS7764140B2Jul 27, 2010
Radio frequency power delivery system
MKS INSTR INC139 citations97
US7755300B2Jul 13, 2010
Method and apparatus for preventing instabilities in radio-frequency plasma processing
MKS INSTR INC77 citations97
US8912835B2Dec 16, 2014
Method and system for controlling radio frequency power
MKS INSTR INC65 citations95
US7353771B2Apr 8, 2008
Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator
MKS INSTR INC44 citations90
US7616462B2Nov 10, 2009
Power supply controller to actively drive a load current when the load current exceeds a set point
MKS INSTR INC33 citations86
US6879140B2Apr 12, 2005
Power holdup circuit
MKS INSTR INC12 citations76