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Inventor
JACOBSEN SISSEL
NO
2 patents
Patents
2 patents
US9080870B2
Jul 14, 2015
MEMS structure for an angular rate sensor
KITTILSLAND GJERMUND
0 citations
29
US9051172B2
Jun 9, 2015
Method for manufacturing a hermetically sealed structure
KITTILSLAND GJERMUND
0 citations
26