Inventor
SOLARZ RICHARD
US3 patents
Patents
3 patentsUS9723703B2Aug 1, 2017
System and method for transverse pumping of laser-sustained plasma
KLA TENCOR CORP14 citations81
US9615439B2Apr 4, 2017
System and method for inhibiting radiative emission of a laser-sustained plasma source
KLA TENCOR CORP5 citations71
US9899205B2Feb 20, 2018
System and method for inhibiting VUV radiative emission of a laser-sustained plasma source
KLA TENCOR CORP2 citations69