Inventor
OH SEBAEK
US3 patents
Patents
3 patentsUS9530636B2Dec 27, 2016
Light source with nanostructured antireflection layer
KLA TENCOR CORP7 citations82
US9723703B2Aug 1, 2017
System and method for transverse pumping of laser-sustained plasma
KLA TENCOR CORP14 citations81
US10257918B2Apr 9, 2019
System and method for laser-sustained plasma illumination
KLA TENCOR CORP0 citations37