Inventor

IKEDA FUMIHIKO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “IKEDA FUMIHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

1 patent

US11378728B2Jul 5, 2022

Coating processing apparatus, coating processing method, and storage medium

TOKYO ELECTRON LTD2 citations66

IKEDA FUMIHIKO

1 patent

US8691481B2Apr 8, 2014

Local exposure method and local exposure apparatus

IKEDA FUMIHIKO5 citations57

INAMASU TOSHIFUMI

1 patent

US8307778B2Nov 13, 2012

Coating method and coating unit

INAMASU TOSHIFUMI5 citations53