Inventor
VELLORE KIM RAMKUMAR
US10 patents
Patents
10 patentsUS12230521B2Feb 18, 2025
Method for non-contact low substrate temperature measurement
APPLIED MATERIALS INC0 citations60
US11183411B2Nov 23, 2021
Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
APPLIED MATERIALS INC0 citations60
US10916464B1Feb 9, 2021
Method of pre aligning carrier, wafer and carrier-wafer combination for throughput efficiency
APPLIED MATERIALS INC0 citations60
US11469124B2Oct 11, 2022
Contactless latch and coupling for vacuum wafer transfer cassette
APPLIED MATERIALS INC0 citations59
US12134835B2Nov 5, 2024
Quartz susceptor for accurate non-contact temperature measurement
APPLIED MATERIALS INC0 citations58
US11756816B2Sep 12, 2023
Carrier FOUP and a method of placing a carrier
APPLIED MATERIALS INC0 citations50
US11637004B2Apr 25, 2023
Alignment module with a cleaning chamber
APPLIED MATERIALS INC0 citations50
US11538706B2Dec 27, 2022
System and method for aligning a mask with a substrate
APPLIED MATERIALS INC0 citations50
US11196360B2Dec 7, 2021
System and method for electrostatically chucking a substrate to a carrier
APPLIED MATERIALS INC0 citations50
US11414740B2Aug 16, 2022
Processing system for forming layers
APPLIED MATERIALS INC0 citations47