Inventor
SHIAU GUANG-JYE
US8 patents
⚠️ This page may combine multiple inventors who share the name “SHIAU GUANG-JYE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
3 patentsUS6185839B1Feb 13, 2001
Semiconductor process chamber having improved gas distributor
APPLIED MATERIALS INC83 citations97
US5866483AFeb 2, 1999
Method for anisotropically etching tungsten using SF6, CHF3, and N2
APPLIED MATERIALS INC254 citations93
US6449871B1Sep 17, 2002
Semiconductor process chamber having improved gas distributor
APPLIED MATERIALS INC26 citations92