Inventor
ATO KOJI
JP7 patents
⚠️ This page may combine multiple inventors who share the name “ATO KOJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
5 patentsUS6248009B1Jun 19, 2001
Apparatus for cleaning substrate
EBARA CORP30 citations92
US6494985B1Dec 17, 2002
Method and apparatus for polishing a substrate
EBARA CORP44 citations91
US6439962B1Aug 27, 2002
Cleaning apparatus
EBARA CORP46 citations90
US7850817B2Dec 14, 2010
Polishing device and substrate processing device
EBARA CORP15 citations83
US6148463ANov 21, 2000
Cleaning apparatus
EBARA CORP14 citations72