Inventor
WEIDMAN TIM
US3 patents
Patents
3 patentsUS6204168B1Mar 20, 2001
Damascene structure fabricated using a layer of silicon-based photoresist material
APPLIED MATERIALS INC113 citations97
US6514857B1Feb 4, 2003
Damascene structure fabricated using a layer of silicon-based photoresist material
APPLIED MATERIALS INC57 citations95
US6825562B2Nov 30, 2004
Damascene structure fabricated using a layer of silicon-based photoresist material
APPLIED MATERIALS INC14 citations91