P

Inventor

CUTHILL KIRK SCOTT

US9 patents
⚠️ This page may combine multiple inventors who share the name “CUTHILL KIRK SCOTT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AIR PROD & CHEM

6 patents
US7122222B2Oct 17, 2006

Precursors for depositing silicon containing films and processes thereof

AIR PROD & CHEM634 citations98
US6616972B1Sep 9, 2003

Synthesis of metal oxide and oxynitride

AIR PROD & CHEM27 citations92
US7288145B2Oct 30, 2007

Precursors for depositing silicon containing films

AIR PROD & CHEM13 citations83
US7064224B1Jun 20, 2006

Organometallic complexes and their use as precursors to deposit metal films

AIR PROD & CHEM15 citations83
US9905415B2Feb 27, 2018

Methods for depositing silicon nitride films

AIR PROD & CHEM10 citations81
US7582574B2Sep 1, 2009

Diethylsilane as a silicon source in the deposition of metal silicate films

AIR PROD & CHEM0 citations49

XIAO MANCHAO

1 patent
US8460753B2Jun 11, 2013

Methods for depositing silicon dioxide or silicon oxide films using aminovinylsilanes

XIAO MANCHAO24 citations92

VERSUM MAT US LLC

1 patent
US10145008B2Dec 4, 2018

Compositions and methods using same for carbon doped silicon containing films

VERSUM MAT US LLC8 citations84

YANG LIU

1 patent
US8703624B2Apr 22, 2014

Dielectric films comprising silicon and methods for making same

YANG LIU18 citations83