P

Inventor

SETSUHARA YUICHI

JP9 patents
⚠️ This page may combine multiple inventors who share the name “SETSUHARA YUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SETSUHARA YUICHI

3 patents
US8916034B2Dec 23, 2014

Thin-film forming sputtering system

SETSUHARA YUICHI2 citations56
US9078336B2Jul 7, 2015

Radio-frequency antenna unit and plasma processing apparatus

SETSUHARA YUICHI1 citations48
US8931433B2Jan 13, 2015

Plasma processing apparatus

SETSUHARA YUICHI0 citations31

JAPAN SCIENCE & TECH AGENCY

2 patents
US7785441B2Aug 31, 2010

Plasma generator, plasma control method, and method of producing substrate

JAPAN SCIENCE & TECH AGENCY9 citations83
US7567037B2Jul 28, 2009

High frequency power supply device and plasma generator

JAPAN SCIENCE & TECH AGENCY17 citations80

NISSIN ELECTRIC CO LTD

2 patents
US7988835B2Aug 2, 2011

Silicon dot forming method and silicon dot forming apparatus

NISSIN ELECTRIC CO LTD2 citations60
US7880392B2Feb 1, 2011

Plasma producing method and apparatus as well as plasma processing apparatus

NISSIN ELECTRIC CO LTD5 citations60

JAPAN SCIENCE & TECH CORP

1 patent
US7098599B2Aug 29, 2006

Plasma generator

JAPAN SCIENCE & TECH CORP10 citations72

MIYAKE SHOJI

1 patent
US8444806B2May 21, 2013

Plasma generator, plasma control method and method of producing substrate

MIYAKE SHOJI2 citations55